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US07682454B2 Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems 有权
具有受保护的密封件和相关的小型加工腔室和多腔室系统的周边分隔阀

  • Patent Title: Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems
  • Patent Title (中): 具有受保护的密封件和相关的小型加工腔室和多腔室系统的周边分隔阀
  • Application No.: US10567319
    Application Date: 2004-08-09
  • Publication No.: US07682454B2
    Publication Date: 2010-03-23
  • Inventor: Ofer Sneh
  • Applicant: Ofer Sneh
  • Applicant Address: US CO Broomfield
  • Assignee: Sundew Technologies, LLC
  • Current Assignee: Sundew Technologies, LLC
  • Current Assignee Address: US CO Broomfield
  • Agency: Patton Boggs LLP
  • International Application: PCT/US2004/025612 WO 20040809
  • International Announcement: WO2005/015613 WO 20050217
  • Main IPC: C23C16/00
  • IPC: C23C16/00 ;  C23F1/00 ;  H01L21/306 ;  C23C16/06 ;  C23C16/22
Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems
Abstract:
A seal-protected perimeter partition valve apparatus (450) defines a vacuum and pressure sealed space (401) within a larger space (540) confining a substrate processing chamber with optimized geometry, minimized footprint and 360° substrate accessibility. A compact perimeter partitioned assembly (520) with seal protected perimeter partition valve (450) and internally contained substrate placement member (480) further provides processing system modularity and substantially minimized system footprint.
Abstract(Chinese):

密封保护的周边分隔阀装置（450）在更大空间（540）内限定真空和压力密封空间（401），限制基板处理室具有优化的几何形状，最小化占地面积和360°基板可访问性。 具有密封保护的周边分隔阀（450）和内部包含的基板放置构件（480）的紧凑的周边分隔组件（520）还提供处理系统模块化并且基本上最小化的系统占用面积。

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