Invention Grant
- Patent Title: Fin structure formation
- Patent Title (中): 鳍结构形成
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Application No.: US11830761Application Date: 2007-07-30
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Publication No.: US07682479B2Publication Date: 2010-03-23
- Inventor: Zhi-Song Huang , S. M. Reza Sadjadi
- Applicant: Zhi-Song Huang , S. M. Reza Sadjadi
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01L21/306 ; C23C16/00
Abstract:
A method for forming fin structures is provided. Sacrificial structures are provided on a substrate. Fin structures are formed on the sides of the sacrificial structures. The forming of the fin structures comprises a plurality of cycles, wherein each cycle comprises a fin deposition phase and a fin profile shaping phase. The sacrificial structure is removed.
Public/Granted literature
- US20080017314A1 FIN STRUCTURE FORMATION Public/Granted day:2008-01-24
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