Invention Grant
US07682529B2 Gallium oxide-zinc oxide sputtering target, method for forming transparent conductive film, and transparent conductive film 有权
氧化镓 - 氧化锌溅射靶,透明导电膜的形成方法和透明导电膜

  • Patent Title: Gallium oxide-zinc oxide sputtering target, method for forming transparent conductive film, and transparent conductive film
  • Patent Title (中): 氧化镓 - 氧化锌溅射靶,透明导电膜的形成方法和透明导电膜
  • Application No.: US11993944
    Application Date: 2006-06-06
  • Publication No.: US07682529B2
    Publication Date: 2010-03-23
  • Inventor: Kozo Osada
  • Applicant: Kozo Osada
  • Applicant Address: JP Tokyo
  • Assignee: Nippon Mining & Metals Co., Ltd.
  • Current Assignee: Nippon Mining & Metals Co., Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: Howson & Howson LLP
  • Priority: JP2005-187540 20050628; JP2005-313051 20051027
  • International Application: PCT/JP2006/311270 WO 20060606
  • International Announcement: WO2007/000878 WO 20070104
  • Main IPC: H01B1/08
  • IPC: H01B1/08 B05D5/12
Gallium oxide-zinc oxide sputtering target, method for forming transparent conductive film, and transparent conductive film
Abstract:
Provided is a high density gallium oxide-zinc oxide series sintered body sputtering target for forming a transparent conductive film containing 20 to 2000 mass ppm of zirconium oxide. In a gallium oxide (Ga2O3)-zinc oxide (ZnO) series sputtering target (GZO series target) for forming a transparent conductive film, trace amounts of specific elements are added to obtain a target capable of improving the conductivity and the bulk density of the target; in other words, capable of improving the component composition to increase the sintered density, inhibit the formation of nodules, and prevent the generation of an abnormal electrical discharge and particles. Also provided are a method for forming a transparent conductive film using such a target, and a transparent conductive film formed thereby.
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