Invention Grant
- Patent Title: Method for making carbon nanotube array
- Patent Title (中): 制造碳纳米管阵列的方法
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Application No.: US11371989Application Date: 2006-03-08
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Publication No.: US07682658B2Publication Date: 2010-03-23
- Inventor: Kai-Li Jiang , Kai Liu , Shou-Shan Fan
- Applicant: Kai-Li Jiang , Kai Liu , Shou-Shan Fan
- Applicant Address: CN Beijing TW Tu-Cheng, Taipei Hsien
- Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: CN Beijing TW Tu-Cheng, Taipei Hsien
- Agent D. Austin Bonderer
- Priority: CN200510033699 20050316
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
A method for making an array of carbon nanotubes includes the steps of: (a) providing a substrate with a film of a first catalyst thereon; (b) disposing the substrate in a quartz boat; (c) disposing a second catalyst adjacent to the substrate in the quartz boat; (d) disposing the quartz boat in a reaction chamber having a gas inlet configured for introducing a carbon source gas and a carrier gas into the reaction chamber and a gas outlet; (e) heating the reaction chamber to a predetermined temperature and introducing the carbon source gas into the reaction chamber along a direction from the second catalyst to the substrate, whereby the second catalyst reacts with the carbon source gas thereby producing a resultant for promoting catalytic activity of the first catalyst; and (f) growing an array of carbon nanotubes on the substrate.
Public/Granted literature
- US20060269668A1 Method for making carbon nanotube array Public/Granted day:2006-11-30
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