Invention Grant
US07682846B2 Single and double-gate pseudo-FET devices for semiconductor materials evaluation
失效
用于半导体材料评估的单栅极和双栅极伪FET器件
- Patent Title: Single and double-gate pseudo-FET devices for semiconductor materials evaluation
- Patent Title (中): 用于半导体材料评估的单栅极和双栅极伪FET器件
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Application No.: US12169190Application Date: 2008-07-08
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Publication No.: US07682846B2Publication Date: 2010-03-23
- Inventor: Harold J. Hovel , Thermon E. McKoy
- Applicant: Harold J. Hovel , Thermon E. McKoy
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L21/36
- IPC: H01L21/36

Abstract:
Several methods and structures are disclosed for determining electrical properties of silicon-on-insulator (SOI) wafers and alternate versions of such wafers such as strained silicon:silicon/germanium:-on-insulator (SSGOI) wafers. The analyzed electrical properties include mobilities, interface state densities, and oxide charge by depositing electrodes on the wafer surface and measuring the current-voltage behavior using these electrodes. In a single gate structure, the source and drain electrodes reside on the wafer surface and the buried insulator acts as the gate oxide, with the substrate acting as the gate electrode. In a double gate structure, an oxide is used on the upper surface between the source and drain electrodes and an additional metal layer is used on top of this oxide to act as a second gate electrode. Light of broad spectrum or specific wavelength may be used to alter electrical carrier densities in the region between the electrodes to further analyze the electrical properties of the material, or alternatively, the device can be used as a detector of light having a wavelength shorter than the bandgap wavelength of the Si surface.
Public/Granted literature
- US20080283919A1 SINGLE AND DOUBLE-GATE PSEUDO-FET DEVICES FOR SEMICONDUCTOR MATERIALS EVALUATION Public/Granted day:2008-11-20
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