Invention Grant
- Patent Title: Method for manufacturing semiconductor optical device
- Patent Title (中): 制造半导体光学器件的方法
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Application No.: US12019665Application Date: 2008-01-25
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Publication No.: US07682857B2Publication Date: 2010-03-23
- Inventor: Yoshihiko Hanamaki , Takehiro Nishida , Makoto Takada , Kenichi Ono
- Applicant: Yoshihiko Hanamaki , Takehiro Nishida , Makoto Takada , Kenichi Ono
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: JP2007-106940 20070416; JP2007-219687 20070827
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for manufacturing a semiconductor optical device includes: forming a p-type cladding layer; forming a capping layer on the p-type cladding layer, the capping layer being selectively etchable relative to the p-type cladding layer; forming a through film on the capping layer; forming a window structure by ion implantation; removing the through film after the ion implantation; and selectively removing the capping layer using a chemical solution.
Public/Granted literature
- US20080254563A1 METHOD FOR MANUFACTURING SEMICONDUCTOR OPTICAL DEVICE Public/Granted day:2008-10-16
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