Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
-
Application No.: US11678894Application Date: 2007-02-26
-
Publication No.: US07682895B2Publication Date: 2010-03-23
- Inventor: Kiyonori Oyu
- Applicant: Kiyonori Oyu
- Applicant Address: JP Tokyo
- Assignee: Elpida Memory, Inc.
- Current Assignee: Elpida Memory, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2006-059906 20060306
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
A method of manufacturing a semiconductor device includes: (A) a wafer process; and (B) a bias application process after the wafer process. The wafer process includes: (a) forming a n-type well in a p-type semiconductor substrate; (b) forming a p-type well in the n-type well; and (c) forming a transistor on the p-type well, the transistor having a n-type source/drain diffusion layer. In the bias application process, a forward bias is applied between the p-type well and the n-type well to move heavy metal ions.
Public/Granted literature
- US20070207577A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2007-09-06
Information query
IPC分类: