Invention Grant
- Patent Title: Digital light valve
- Patent Title (中): 数码光阀
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Application No.: US11483431Application Date: 2006-07-10
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Publication No.: US07682948B2Publication Date: 2010-03-23
- Inventor: John W. Hartzell
- Applicant: John W. Hartzell
- Applicant Address: US WA Camas
- Assignee: Sharp Laboratories of America, Inc.
- Current Assignee: Sharp Laboratories of America, Inc.
- Current Assignee Address: US WA Camas
- Agency: Law Office of Gerald Maliszewski
- Agent Gerald Maliszewski
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A system and method are provided for crystallizing a semiconductor film using a digital light valve. The method comprises: enabling pixel elements from an array of selectable pixel elements; in response to enabling the pixel elements, gating a light; sequentially exposing adjacent areas of a semiconductor film, such as Si, to the gated light; annealing the light-exposed areas of semiconductor film; and, in response to the annealing, laterally growing crystal grains in the semiconductor film. For example, the method may sequentially expose adjacent areas of semiconductor film to gated light in a first direction; and, simultaneously exposing adjacent areas of semiconductor film to gated light in a second direction, different than the first direction. For example, the second direction may be perpendicular to the first direction. As a result, crystal grains can be laterally grown simultaneously in the first and second directions.
Public/Granted literature
- US20060252237A1 Digital light valve Public/Granted day:2006-11-09
Information query
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