Invention Grant
US07682950B2 Method of manufacturing laterally crystallized semiconductor layer and method of manufacturing thin film transistor using the same method 有权
使用相同的方法制造横向结晶的半导体层的方法和制造薄膜晶体管的方法

Method of manufacturing laterally crystallized semiconductor layer and method of manufacturing thin film transistor using the same method
Abstract:
Provided are a method of manufacturing a laterally crystallized semiconductor layer and a method of manufacturing a thin film transistor (TFT) using the method. The method of manufacturing the laterally crystallized semiconductor layer comprises: forming a semiconductor layer on a substrate; irradiating laser beams on the semiconductor layer; splitting the laser beams using a prism sheet comprising an array of a plurality of prisms, advancing the laser beams toward the semiconductor layer to alternately form first and second areas in the semiconductor layer so as to fully melt the first areas, wherein the laser beams are irradiated onto the first areas, and the laser beams are not irradiated onto the second areas; and inducing the first areas to be laterally crystallized using the second areas as seeds.
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