Invention Grant
US07682951B2 Method for fabricating a polysilicon layer having large and uniform grains
有权
制造具有大而均匀晶粒的多晶硅层的方法
- Patent Title: Method for fabricating a polysilicon layer having large and uniform grains
- Patent Title (中): 制造具有大而均匀晶粒的多晶硅层的方法
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Application No.: US11978328Application Date: 2007-10-29
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Publication No.: US07682951B2Publication Date: 2010-03-23
- Inventor: Shuo-Ting Yan
- Applicant: Shuo-Ting Yan
- Applicant Address: TW Miao-Li County
- Assignee: Innolux Display Corp.
- Current Assignee: Innolux Display Corp.
- Current Assignee Address: TW Miao-Li County
- Agent Wei Te Chung
- Priority: TW95139823A 20061027
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
An exemplary method for fabricating a polysilicon layer includes the following steps. A substrate (10) is provided and an amorphous silicon layer (12) is formed over the substrate. An excimer laser generator (13) for generating a pulse excimer laser beams collectively having the shape of a generally rectangular shaft is provided to melt a first area (15) of the amorphous silicon layer with the pulse excimer laser beams. The excimer laser generator is moved a distance to melt a second area of the amorphous layer spaced a short distance away from the first area. At least a subsequent third melted area spaced a short distance away from the second melted area is formed, with each subsequent melted area is spaced as short distance away from the immediately preceding melted area.
Public/Granted literature
- US20080102611A1 Method for fabricating a polysilicon layer having large and uniform grains Public/Granted day:2008-05-01
Information query
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