Invention Grant
US07682951B2 Method for fabricating a polysilicon layer having large and uniform grains 有权
制造具有大而均匀晶粒的多晶硅层的方法

  • Patent Title: Method for fabricating a polysilicon layer having large and uniform grains
  • Patent Title (中): 制造具有大而均匀晶粒的多晶硅层的方法
  • Application No.: US11978328
    Application Date: 2007-10-29
  • Publication No.: US07682951B2
    Publication Date: 2010-03-23
  • Inventor: Shuo-Ting Yan
  • Applicant: Shuo-Ting Yan
  • Applicant Address: TW Miao-Li County
  • Assignee: Innolux Display Corp.
  • Current Assignee: Innolux Display Corp.
  • Current Assignee Address: TW Miao-Li County
  • Agent Wei Te Chung
  • Priority: TW95139823A 20061027
  • Main IPC: H01L21/20
  • IPC: H01L21/20
Method for fabricating a polysilicon layer having large and uniform grains
Abstract:
An exemplary method for fabricating a polysilicon layer includes the following steps. A substrate (10) is provided and an amorphous silicon layer (12) is formed over the substrate. An excimer laser generator (13) for generating a pulse excimer laser beams collectively having the shape of a generally rectangular shaft is provided to melt a first area (15) of the amorphous silicon layer with the pulse excimer laser beams. The excimer laser generator is moved a distance to melt a second area of the amorphous layer spaced a short distance away from the first area. At least a subsequent third melted area spaced a short distance away from the second melted area is formed, with each subsequent melted area is spaced as short distance away from the immediately preceding melted area.
Information query
Patent Agency Ranking
0/0