Invention Grant
- Patent Title: Maskless nanofabrication of electronic components
- Patent Title (中): 电子元件无掩模纳米制造
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Application No.: US11478294Application Date: 2006-06-29
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Publication No.: US07682970B2Publication Date: 2010-03-23
- Inventor: Constantine P. Grigoropoulos , Seung-Hwan Ko , Jaewon Chung , Dimos Poulikakos , Heng Pan
- Applicant: Constantine P. Grigoropoulos , Seung-Hwan Ko , Jaewon Chung , Dimos Poulikakos , Heng Pan
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Bozicevic, Field & Francis LLP
- Agent Bret E. Field
- Main IPC: H01L21/44
- IPC: H01L21/44
Abstract:
The present invention relates to systems, materials and methods for the formation of conducting, semiconducting, and dielectric layers, structures and devices from suspensions of nanoparticles. Drop-on-demand systems are used in some embodiments to fabricate various electronic structures including conductors, capacitors, FETs. Selective laser ablation is used in some embodiments to pattern more precisely the circuit elements and to form small channel devices.
Public/Granted literature
- US20100035375A1 MASKLESS NANOFABRICATION OF ELECTRONIC COMPONENTS Public/Granted day:2010-02-11
Information query
IPC分类:
