Invention Grant
- Patent Title: Advanced multilayer coreless support structures and method for their fabrication
- Patent Title (中): 高级多层无芯支撑结构及其制造方法
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Application No.: US11421600Application Date: 2006-06-01
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Publication No.: US07682972B2Publication Date: 2010-03-23
- Inventor: Dror Hurwitz , Mordechay Farkash , Eva Igner , Boris Statnikov , Benny Michaeli
- Applicant: Dror Hurwitz , Mordechay Farkash , Eva Igner , Boris Statnikov , Benny Michaeli
- Applicant Address: IL Migdal Haemek
- Assignee: Amitec-Advanced Multilayer Interconnect Technoloiges Ltd.
- Current Assignee: Amitec-Advanced Multilayer Interconnect Technoloiges Ltd.
- Current Assignee Address: IL Migdal Haemek
- Agency: Dennison, Schultz & MacDonald
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A method of fabricating a free standing membrane including via array in a dielectric for use as a precursor in the construction of superior electronic support structures, includes the steps of fabricating a membrane of conductive vias in a dielectric surround on a sacrificial carrier, and detaching the membrane from the sacrificial carrier to form a free standing laminated array. An electronic substrate based on such a free standing membrane may be formed by thinning and planarizing laminated array, followed by terminating.
Public/Granted literature
- US20070281471A1 Advanced Multilayered Coreless Support Structures and their Fabrication Public/Granted day:2007-12-06
Information query
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