Invention Grant
US07682972B2 Advanced multilayer coreless support structures and method for their fabrication 有权
高级多层无芯支撑结构及其制造方法

Advanced multilayer coreless support structures and method for their fabrication
Abstract:
A method of fabricating a free standing membrane including via array in a dielectric for use as a precursor in the construction of superior electronic support structures, includes the steps of fabricating a membrane of conductive vias in a dielectric surround on a sacrificial carrier, and detaching the membrane from the sacrificial carrier to form a free standing laminated array. An electronic substrate based on such a free standing membrane may be formed by thinning and planarizing laminated array, followed by terminating.
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