Invention Grant
US07683370B2 Source/drain electrodes, transistor substrates and manufacture methods, thereof, and display devices 有权
源极/漏极,晶体管基板及其制造方法以及显示装置

Source/drain electrodes, transistor substrates and manufacture methods, thereof, and display devices
Abstract:
In a thin-film transistor substrate including a substrate, a thin-film transistor semiconductor layer, a source/drain electrode, and a transparent pixel electrode, the source/drain electrode includes a thin film of an aluminum alloy containing 0.1 to 6 atomic percent of nickel as an alloy element, and the aluminum alloy thin film is directly connected to the thin-film transistor semiconductor layer.
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