Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
- Patent Title (中): 半导体装置及其制造方法
-
Application No.: US11301992Application Date: 2005-12-12
-
Publication No.: US07683415B2Publication Date: 2010-03-23
- Inventor: Jin-Youn Cho
- Applicant: Jin-Youn Cho
- Applicant Address: KR
- Assignee: Magnachip Semiconductor, Ltd.
- Current Assignee: Magnachip Semiconductor, Ltd.
- Current Assignee Address: KR
- Agency: Blakely, Sokoloff, Taylor & Zafman
- Priority: KR10-2004-0116971 20041230
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94

Abstract:
A semiconductor device and a method for fabricating the same are provided. The method includes: forming a contact plug passing through an inter-layer insulation layer; sequentially forming a lower electrode layer, a dielectric layer and an upper electrode layer on the inter-layer insulation layer; patterning the upper electrode layer; patterning the dielectric layer and the lower electrode layer, thereby obtaining a capacitor including an upper electrode, a patterned dielectric layer and a lower electrode; and sequentially forming a first metal interconnection line connected with the contact plug and second metal interconnection lines connected with the capacitor.
Public/Granted literature
- US20060145293A1 Semiconductor device and method for fabricating the same Public/Granted day:2006-07-06
Information query
IPC分类: