Invention Grant
US07683424B2 Ballistic direct injection NROM cell on strained silicon structures
有权
应力硅结构上的弹道直接注入NROM电池
- Patent Title: Ballistic direct injection NROM cell on strained silicon structures
- Patent Title (中): 应力硅结构上的弹道直接注入NROM电池
-
Application No.: US11438978Application Date: 2006-05-23
-
Publication No.: US07683424B2Publication Date: 2010-03-23
- Inventor: Leonard Forbes
- Applicant: Leonard Forbes
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Leffert Jay & Polglaze, P.A.
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
A nitride read only memory cell comprising a silicon-germanium layer with a pair of source/drain regions. A strained silicon layer is formed overlying the silicon-germanium layer such that the pair of source/drain regions is linked by a channel that is generated in the strained silicon layer during operation of the cell. A nitride layer is formed overlying the substrate. The nitride layer has at least one charge storage region. The nitride layer may be a planar layer, a planar split gate nitride layer, or a vertical split nitride layer. A control gate is formed overlying the nitride layer. Ballistic direct injection is used to program the memory cell. A first charge storage region of the nitride layer establishes a virtual source/drain region in the channel. The virtual source/drain region has a lower threshold voltage than the remaining portion of the channel.
Public/Granted literature
- US20060214220A1 Ballistic direct injection NROM cell on strained silicon structures Public/Granted day:2006-09-28
Information query
IPC分类: