Invention Grant
US07683437B2 Semiconductor device having fin field effect transistor and manufacturing method thereof
有权
具有鳍状场效应晶体管的半导体器件及其制造方法
- Patent Title: Semiconductor device having fin field effect transistor and manufacturing method thereof
- Patent Title (中): 具有鳍状场效应晶体管的半导体器件及其制造方法
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Application No.: US11896050Application Date: 2007-08-29
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Publication No.: US07683437B2Publication Date: 2010-03-23
- Inventor: Noriaki Mikasa
- Applicant: Noriaki Mikasa
- Applicant Address: JP Chuo-ku, Tokyo
- Assignee: Elpida Memory, Inc.
- Current Assignee: Elpida Memory, Inc.
- Current Assignee Address: JP Chuo-ku, Tokyo
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2006-233499 20060830
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/06

Abstract:
A semiconductor device including fin-FETs capable of suppressing both OFF-current resulting from the short channel effect and junction leakage, and a manufacturing method thereof are provided. A semiconductor device comprises: an active region defined to have a crank shape by an STI region formed on a semiconductor substrate, the active region having an upper surface higher than an upper surface of the STI region; a source region and a drain region formed on both ends of the active region, respectively; a channel region formed between the source region and the drain region in the active region; and a gate electrode covering an upper surface and side surfaces of a central portion of the active region including the channel region.
Public/Granted literature
- US20080054374A1 Semiconductor device having fin field effect transistor and manufacturing method thereof Public/Granted day:2008-03-06
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