Invention Grant
- Patent Title: Intermetallic diffusion block device and method of manufacture
- Patent Title (中): 金属间扩散块装置及其制造方法
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Application No.: US12111510Application Date: 2008-04-29
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Publication No.: US07683493B2Publication Date: 2010-03-23
- Inventor: Charles L. Arvin , Carla A. Bailey , Harry D. Cox , Hua Gan , Hsichang Liu , Arthur G. Merryman , Vall F. McClean , Srinivasa S. N. Reddy , Brian R. Sundlof
- Applicant: Charles L. Arvin , Carla A. Bailey , Harry D. Cox , Hua Gan , Hsichang Liu , Arthur G. Merryman , Vall F. McClean , Srinivasa S. N. Reddy , Brian R. Sundlof
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Joseph Petrokaitis
- Main IPC: H01L23/52
- IPC: H01L23/52

Abstract:
One embodiment of the present invention is directed to an under bump metallurgy material. The under bump metallurgy material of this embodiment includes an adhesion layer and a conduction layer formed on top of the adhesion layer. The under bump metallurgy material of this embodiment also includes a barrier layer plated on top of the conduction layer and a sacrificial layer plated on top of the barrier layer. The conduction layer of this embodiment includes a trench formed therein, the trench contacting a portion of the barrier layer and blocking a path of intermetallic formation between the conduction layer and the sacrificial layer.
Public/Granted literature
- US20090267228A1 INTERMETALLIC DIFFUSION BLOCK DEVICE AND METHOD OF MANUFACTURE Public/Granted day:2009-10-29
Information query
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