Invention Grant
- Patent Title: CI-core actuator for long travel in a transverse direction
- Patent Title (中): CI芯执行器可在横向长行驶
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Application No.: US11306134Application Date: 2005-12-16
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Publication No.: US07683506B2Publication Date: 2010-03-23
- Inventor: Douglas C. Watson
- Applicant: Douglas C. Watson
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: T & I Law Group, PC
- Main IPC: H02K41/02
- IPC: H02K41/02

Abstract:
Methods and apparatus for providing relatively long travel in a transverse direction for a magnetic levitation stage apparatus are disclosed. According to one aspect of the present invention, a linear actuator includes a first core, a second core, and at least one coil wrapped around the first core. The first core includes a body portion and a plurality of rails. The body portion has a first axis and a second axis, and the rails have longitudinal axes that are perpendicular to the first axis and parallel to the second axis. The dimensions of the rails along the longitudinal axes are substantially larger than a dimension of the body portion along the second axis. The second core has a third axis that is oriented perpendicularly to the longitudinal axes and to the second axis, and is levitated relative to the first core when a current is provided through the coil.
Public/Granted literature
- US20080296983A1 CI-CORE ACTUATOR FOR LONG TRAVEL IN A TRANSVERSE DIRECTION Public/Granted day:2008-12-04
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