Invention Grant
US07683567B2 Method for improving scanning probe microscope imaging by inverse filtering
有权
通过逆滤波改善扫描探针显微镜成像的方法
- Patent Title: Method for improving scanning probe microscope imaging by inverse filtering
- Patent Title (中): 通过逆滤波改善扫描探针显微镜成像的方法
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Application No.: US11461205Application Date: 2006-07-31
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Publication No.: US07683567B2Publication Date: 2010-03-23
- Inventor: Daniel Y Abramovitch
- Applicant: Daniel Y Abramovitch
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G05B5/01
- IPC: G05B5/01

Abstract:
In accordance with the invention, an inverse filter is used to improve scanned images from a scanning probe microscope by removing the effect of the scanning system dynamics from the image data. This may be done in-line or as a post-processing operation.
Public/Granted literature
- US20080024085A1 Method for Improving Scanning Probe Microscope Imaging by Inverse Filtering Public/Granted day:2008-01-31
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