Invention Grant
- Patent Title: Micromachined capacitive sensor and linkage
- Patent Title (中): 微机电容传感器和联动
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Application No.: US11538732Application Date: 2006-10-04
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Publication No.: US07683634B2Publication Date: 2010-03-23
- Inventor: Storrs T. Hoen
- Applicant: Storrs T. Hoen
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01R27/26
- IPC: G01R27/26
Abstract:
In accordance with the invention, a surface capacitive sensor is mechanically coupled to a conventional macrostructure actuator to measure the displacement of the actuator along a measurement axis with high accuracy.
Public/Granted literature
- US20080094075A1 MICROMACHINED CAPACITIVE SENSOR AND LINKAGE Public/Granted day:2008-04-24
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