Invention Grant
US07683854B2 Tunable impedance surface and method for fabricating a tunable impedance surface 有权
可调谐阻抗表面和制造可调谐阻抗表面的方法

Tunable impedance surface and method for fabricating a tunable impedance surface
Abstract:
A tunable impedance surface includes a varactor. The varactor comprises a bottom electrode formed on a surface of a substrate. First and second ferroelectric elements are on top of the bottom electrode and electrically connected to one another through the bottom electrode. A first top electrode is on top of and electrically connected to the first ferroelectric element and a second top electrode is on top of and electrically connected to the second ferroelectric element.
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