Invention Grant
- Patent Title: Interferometer and method for measuring characteristics of optically unresolved surface features
- Patent Title (中): 用于测量光学未解析表面特征的干涉仪和方法
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Application No.: US12017531Application Date: 2008-01-22
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Publication No.: US07684049B2Publication Date: 2010-03-23
- Inventor: Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
- Applicant: Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02
Abstract:
Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
Public/Granted literature
- US20080266574A1 INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALLY UNRESOLVED SURFACE FEATURES Public/Granted day:2008-10-30
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