Invention Grant
- Patent Title: Fiber optic seismic sensor based on MEMS cantilever
- Patent Title (中): 基于MEMS悬臂梁的光纤地震传感器
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Application No.: US11787965Application Date: 2007-04-18
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Publication No.: US07684051B2Publication Date: 2010-03-23
- Inventor: John W. Berthold , David B. Needham
- Applicant: John W. Berthold , David B. Needham
- Applicant Address: US TX Houston
- Assignee: Halliburton Energy Services, Inc.
- Current Assignee: Halliburton Energy Services, Inc.
- Current Assignee Address: US TX Houston
- Agent Peter Schroeder
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A dual cantilevered beam structure is attached to a silicon frame. An optical fiber extends from a borosilicate wafer bonded to the bottom of the frame. A second borosilicate wafer is bonded to the top of the frame. The bottom borosilicate wafer is bonded to the optical fiber with a bonding agent having an index of refraction between the refractive index of the fused silica optical fiber and the refractive index of the borosilicate wafer. In an embodiment, the bonding agent has a refractive index substantially similar to optical cement. Light is reflected into the optical fiber from the beam structure for measuring seismic changes.
Public/Granted literature
- US20080174781A1 Fiber optic seismic sensor based on MEMS cantilever Public/Granted day:2008-07-24
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