Invention Grant
US07684131B2 Method and a device for positioning an element in an optical system 有权
用于将元件定位在光学系统中的方法和装置

Method and a device for positioning an element in an optical system
Abstract:
The disclosure generally relates to methods, devices, systems and components configured to position an element in a lens assembly, such as a lens assembly for microlithography, in which the element to be positioned is moved from an actual position to a target position via at least one actuator, and in which at least the positioning movement of the actuator is superimposed with an oscillating movement.
Information query
Patent Agency Ranking
0/0