Invention Grant
US07684131B2 Method and a device for positioning an element in an optical system
有权
用于将元件定位在光学系统中的方法和装置
- Patent Title: Method and a device for positioning an element in an optical system
- Patent Title (中): 用于将元件定位在光学系统中的方法和装置
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Application No.: US11861851Application Date: 2007-09-26
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Publication No.: US07684131B2Publication Date: 2010-03-23
- Inventor: Karl-Eugen Aubele
- Applicant: Karl-Eugen Aubele
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006046200 20060929
- Main IPC: G02B7/02
- IPC: G02B7/02 ; G02B26/00

Abstract:
The disclosure generally relates to methods, devices, systems and components configured to position an element in a lens assembly, such as a lens assembly for microlithography, in which the element to be positioned is moved from an actual position to a target position via at least one actuator, and in which at least the positioning movement of the actuator is superimposed with an oscillating movement.
Public/Granted literature
- US20080080070A1 METHOD AND A DEVICE FOR POSITIONING AN ELEMENT IN AN OPTICAL SYSTEM Public/Granted day:2008-04-03
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |