Invention Grant
- Patent Title: Extendable MES for Cross-AMHS Transportation
- Patent Title (中): 用于跨AMHS运输的可扩展MES
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Application No.: US11745521Application Date: 2007-05-08
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Publication No.: US07684888B2Publication Date: 2010-03-23
- Inventor: Hsieh-Chi Chen , Chih-Yuan Yu
- Applicant: Hsieh-Chi Chen , Chih-Yuan Yu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G05B19/18
- IPC: G05B19/18 ; G05B11/01 ; G06F19/00 ; G06F7/00

Abstract:
In one aspect a factory automation system for a wafer fab is provided. The factory automation system is adapted to facilitate cross-AMHS transfers of wafer lots within a semiconductor foundry. The factory automation system may include a first MCS and an associated first AMHS; a second MCS and an associated second AMHS; and a third MCS and an associated third AMHS. The system may also include a first bridge connecting the first AMHS and the second AMHS to allow a FOUP to travel between the first AMHS and the second AMHS. The system may also include a second bridge connecting the second AMHS and the third AMHS to allow a FOUP to travel between the second AMHS and the third AMHS. The system also includes a unified control unit in communication with the first, second, and third MCSs, the unified control unit for coordinating transfers of FOUPs between the first, second, and third AMHSs.
Public/Granted literature
- US20080281456A1 Extendable MES for Cross-AMHS Transportation Public/Granted day:2008-11-13
Information query
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