Invention Grant
- Patent Title: Step-walk relaxation method for global optimization of masks
- Patent Title (中): 步进放松法全面优化面罩
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Application No.: US12416312Application Date: 2009-04-01
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Publication No.: US07685559B2Publication Date: 2010-03-23
- Inventor: Alan E. Rosenbluth
- Applicant: Alan E. Rosenbluth
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Harrington & Smith
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03C5/00

Abstract:
A set of candidate global optima is identified, one of which is a global solution for making a mask for printing a lithographic pattern. A solution space is formed from dominant joint eigenvectors that is constrained for bright and dark areas of the printed pattern. The solution space is mapped to identify regions each containing at most one local minimum intensity. For each selected region, stepped intensity contours are generated for intensity of the dark areas and stepped constraint surfaces are generated for a target exposure dose at an individual test point. An individual test point is stepped toward a lowest intensity contour along the stepped constraint surfaces of each selected region. Further lowering of the intensities of these points is also detailed, where possible in adjacent regions, to yield final test points. The set of candidate global optima is the final test points at their respective lowest intensity contour of the respective selected regions.
Public/Granted literature
- US20090199150A1 Step-Walk Relaxation Method for Global Optimization of Masks Public/Granted day:2009-08-06
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