Invention Grant
- Patent Title: Apparatus and method for making carbon nanotube array
- Patent Title (中): 制造碳纳米管阵列的装置和方法
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Application No.: US11371997Application Date: 2006-03-08
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Publication No.: US07687109B2Publication Date: 2010-03-30
- Inventor: Kai-Li Jiang , Kai Liu , Shou-Shan Fan
- Applicant: Kai-Li Jiang , Kai Liu , Shou-Shan Fan
- Applicant Address: CN Beijing TW Tu-Cheng, Taipei Hsien
- Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: CN Beijing TW Tu-Cheng, Taipei Hsien
- Agent D. Austin Bonderer
- Priority: CN200510033733 20050318
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C01B31/02 ; C01B31/00 ; D01C5/00

Abstract:
An apparatus for making an array of carbon nanotubes includes a reaction chamber with a gas inlet and a gas outlet; a quartz boat disposed in the reaction chamber; a substrate with a surface deposited with a film of first catalyst, the substrate being disposed in the quartz boat; and a second catalyst disposed in the quartz beside the substrate. A method for making an array of carbon nanotubes, comprising the steps of: (a) providing a substrate with a surface deposited with a film of first catalyst; (b) disposing a second catalyst beside the substrate to produce small amounts of hydrogen gas which flows to the first catalyst; (c) introducing a carrier gas and a carbon source gas flowing from the second catalyst to the first catalyst at a predetermined temperature; and (d) growing an array of carbon nanotubes extending from the substrate.
Public/Granted literature
- US20060269669A1 Apparatus and method for making carbon nanotube array Public/Granted day:2006-11-30
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