Invention Grant
US07687228B2 Antireflection film composition and patterning process using the same
有权
防反射膜组合物和使用其的图案化工艺
- Patent Title: Antireflection film composition and patterning process using the same
- Patent Title (中): 防反射膜组合物和使用其的图案化工艺
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Application No.: US12071804Application Date: 2008-02-26
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Publication No.: US07687228B2Publication Date: 2010-03-30
- Inventor: Jun Hatakeyama , Kazumi Noda , Seiichiro Tachibana , Takeshi Kinsho , Tsutomu Ogihara
- Applicant: Jun Hatakeyama , Kazumi Noda , Seiichiro Tachibana , Takeshi Kinsho , Tsutomu Ogihara
- Applicant Address: JP Tokyo
- Assignee: Shin Etsu Chemical Co., Ltd.
- Current Assignee: Shin Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-060010 20070309
- Main IPC: G03F7/11
- IPC: G03F7/11 ; H01L21/027 ; G03F7/40 ; C08F20/24

Abstract:
An antireflection film composition, wherein an etching speed is fast, thus, when used as a resist lower layer, a film loss of a resist pattern and deformation of the pattern during etching can be minimized, and because of a high crosslinking density, a dense film can be formed after thermal crosslinking, thus, mixing with an upper layer resist can be prevented and the resist pattern after development is good is provided. The antireflection film composition comprising; at least a polymer having a repeating unit represented by the following general formula (I).
Public/Granted literature
- US20080220381A1 Antireflection film composition and patterning process using the same Public/Granted day:2008-09-11
Information query
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