Invention Grant
- Patent Title: Method for manufacturing semiconductor memory device using asymmetric junction ion implantation
- Patent Title (中): 使用不对称结离子注入制造半导体存储器件的方法
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Application No.: US11450816Application Date: 2006-06-09
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Publication No.: US07687350B2Publication Date: 2010-03-30
- Inventor: Min Yong Lee , Kyoung Bong Rouh , Seung Woo Jin
- Applicant: Min Yong Lee , Kyoung Bong Rouh , Seung Woo Jin
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Marshall, Gerstein & Borun LLP
- Priority: KR10-2005-0087890 20050921
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for manufacturing a semiconductor memory device using asymmetric junction ion implantation, including performing ion implantation for adjusting a threshold voltage to a semiconductor substrate, forming a gate stack on the semiconductor substrate to define a storage node junction region and a bit line junction region, implanting a first conductive impurity ion and a second conductive impurity ion using a mask layer pattern covering the storage node junction region while exposing the bit line junction region, forming a gate spacer layer at both sides of the gate stack, and implanting the first conductive impurity ion using the gate stack and the gate spacer layer as an ion implantation mask layer to form a storage node junction region and a bit line junction region having different impurity concentrations, and different junction depths from each other.
Public/Granted literature
- US20070065999A1 Method for manufacturing semiconductor memory device using asymmetric junction ion implantation Public/Granted day:2007-03-22
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