Invention Grant
- Patent Title: Semi-aqueous stripping and cleaning composition containing aminobenzenesulfonic acid
- Patent Title (中): 含有氨基苯磺酸的半水洗脱组合物
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Application No.: US12047655Application Date: 2008-03-13
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Publication No.: US07687447B2Publication Date: 2010-03-30
- Inventor: Matthew I. Egbe , Michael Walter Legenza , Dana L. Durham
- Applicant: Matthew I. Egbe , Michael Walter Legenza , Dana L. Durham
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Lina Yang
- Main IPC: C11D7/50
- IPC: C11D7/50
Abstract:
The present invention relates to semi-aqueous compositions and the method using same, to remove highly cross-linked resists and etch-residues. The compositions are comprised of aminobenzenesulfonic acid, water miscible organic solvent and water.
Public/Granted literature
- US20090233827A1 Semi-Aqueous Stripping and Cleaning Composition Containing Aminobenzenesulfonic Acid Public/Granted day:2009-09-17
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