Invention Grant
US07687838B2 Resistive memory device having array of probes and method of manufacturing the resistive memory device
失效
具有探针阵列的电阻式存储器件和制造该阻性存储器件的方法
- Patent Title: Resistive memory device having array of probes and method of manufacturing the resistive memory device
- Patent Title (中): 具有探针阵列的电阻式存储器件和制造该阻性存储器件的方法
-
Application No.: US11240570Application Date: 2005-10-03
-
Publication No.: US07687838B2Publication Date: 2010-03-30
- Inventor: Seung-bum Hong , Ju-hwan Jung , Hyoung-soo Ko , Hong-sik Park , Dong-ki Min , Eun-sik Kim , Chul-min Park , Sung-dong Kim , Kyoung-lock Baeck
- Applicant: Seung-bum Hong , Ju-hwan Jung , Hyoung-soo Ko , Hong-sik Park , Dong-ki Min , Eun-sik Kim , Chul-min Park , Sung-dong Kim , Kyoung-lock Baeck
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2004-0088163 20041102
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/00 ; G11B9/00 ; G11B3/00 ; G11B11/00

Abstract:
Provided are a resistive memory device having a probe array and a method of manufacturing the same. The resistive memory device includes a memory part having a bottom electrode and a ferroelectric layer sequentially formed on a first substrate; a probe part having an array of resistive probes arranged on a second substrate, with the tips of the resistive probes facing the ferroelectric layer so as to write and read data on the ferroelectric layer; and a binding layer which grabs and fixes the resistive probes on or above the ferroelectric layer. The method of manufacturing the resistive memory device includes forming a bottom electrode and a ferroelectric layer sequentially on a first substrate; forming an array of resistive probes on a second substrate; and wafer level bonding the first substrate to the second substrate using a binding layer such that tips of the resistive probes face the ferroelectric layer.
Public/Granted literature
- US20060091437A1 Resistive memory device having array of probes and method of manufacturing the resistive memory device Public/Granted day:2006-05-04
Information query
IPC分类: