Invention Grant
- Patent Title: Recess gate type transistor
- Patent Title (中): 嵌入式门型晶体管
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Application No.: US12371788Application Date: 2009-02-16
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Publication No.: US07687852B2Publication Date: 2010-03-30
- Inventor: Kyoung Bong Rouh , Seung Woo Jin , Min Yong Lee , Yong Soo Jung
- Applicant: Kyoung Bong Rouh , Seung Woo Jin , Min Yong Lee , Yong Soo Jung
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Marshall, Gerstein & Borun LLP
- Priority: KR10-2005-0134296 20051229
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A semiconductor device having recess gates and a method for fabricating the same. The semiconductor device includes a semiconductor substrate having inverse triangular recesses formed therein; a gate insulating film having a designated thickness formed on the semiconductor substrate; gate electrodes formed on the gate insulating film so that the gate electrodes fill the inverse triangular recesses and protrude from the surface of the semiconductor substrate; and first and second junction regions formed in the semiconductor substrate and opposed to each other so that the corresponding one of the gate electrodes is interposed therebetween.
Public/Granted literature
- US20090173996A1 Recess Gate Type Transistor Public/Granted day:2009-07-09
Information query
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