Invention Grant
- Patent Title: Method and apparatus for measurement of exit pupil transmittance
- Patent Title (中): 出射瞳孔透射率的测量方法和装置
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Application No.: US11105799Application Date: 2005-04-13
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Publication No.: US07688426B2Publication Date: 2010-03-30
- Inventor: Adlai H. Smith , Robert O. Hunter, Jr.
- Applicant: Adlai H. Smith , Robert O. Hunter, Jr.
- Applicant Address: US CA San Diego
- Assignee: Litel Instruments
- Current Assignee: Litel Instruments
- Current Assignee Address: US CA San Diego
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/54

Abstract:
A method and apparatus for determining the state of the lens transmittance of an optical projection system are described. A lens or imaging objective transmission is determined as a function of exit pupil transverse direction cosine (nx,ny) at multiple field points thereby providing a more complete analysis and correction of a photolithographic exposure system. The entrance pupil of a projection imaging system is uniformly illuminated and the angular dependence of transmission through the imaging system as a function of exit pupil direction cosines is determined. The illumination source includes a light conditioner with an in-situ illumination structure (ISIS), which is an optical structure that can provide uniform illumination of the system's entrance pupil.
Public/Granted literature
- US20050237512A1 Method and apparatus for measurement of exit pupil transmittance Public/Granted day:2005-10-27
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