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US07688456B2 Assessment and optimization for metrology instrument 失效
计量仪器的评估与优化

Assessment and optimization for metrology instrument
Abstract:
Methods and related program product for assessing and optimizing metrology instruments by determining a total measurement uncertainty (TMU) based on precision and accuracy. The TMU is calculated based on a linear regression analysis and removing a reference measuring system uncertainty (URMS) from a net residual error. The TMU provides an objective and more accurate representation of whether a measurement system under test has an ability to sense true product variation.
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