Invention Grant
- Patent Title: Assessment and optimization for metrology instrument
- Patent Title (中): 计量仪器的评估与优化
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Application No.: US12021356Application Date: 2008-01-29
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Publication No.: US07688456B2Publication Date: 2010-03-30
- Inventor: Charles N. Archie , G. William Banke, Jr.
- Applicant: Charles N. Archie , G. William Banke, Jr.
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Ian MacKinnon
- Main IPC: G01B11/14
- IPC: G01B11/14

Abstract:
Methods and related program product for assessing and optimizing metrology instruments by determining a total measurement uncertainty (TMU) based on precision and accuracy. The TMU is calculated based on a linear regression analysis and removing a reference measuring system uncertainty (URMS) from a net residual error. The TMU provides an objective and more accurate representation of whether a measurement system under test has an ability to sense true product variation.
Public/Granted literature
- US20080140342A1 ASSESSMENT AND OPTIMIZATION FOR METROLOGY INSTRUMENT Public/Granted day:2008-06-12
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