Invention Grant
US07690960B2 Production method of organic EL device and cleaning method of organic EL device production apparatus
有权
有机EL元件的制造方法及有机EL元件制造装置的清洗方法
- Patent Title: Production method of organic EL device and cleaning method of organic EL device production apparatus
- Patent Title (中): 有机EL元件的制造方法及有机EL元件制造装置的清洗方法
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Application No.: US11628064Application Date: 2004-05-31
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Publication No.: US07690960B2Publication Date: 2010-04-06
- Inventor: Natsuki Takahashi , Koichi Sakasegawa , Takeshi Igarashi , Yasuki Nishinobo , Masahiko Otomo , Osamu Irisawa , Kazuo Yamada
- Applicant: Natsuki Takahashi , Koichi Sakasegawa , Takeshi Igarashi , Yasuki Nishinobo , Masahiko Otomo , Osamu Irisawa , Kazuo Yamada
- Applicant Address: JP Chigasaki-shi
- Assignee: ULVAC, Inc.
- Current Assignee: ULVAC, Inc.
- Current Assignee Address: JP Chigasaki-shi
- Agency: Kratz, Quintos & Hanson, LLP
- International Application: PCT/JP2004/007482 WO 20040531
- International Announcement: WO2005/117498 WO 20051208
- Main IPC: H01J9/00
- IPC: H01J9/00
Abstract:
The object of the present invention is to provide a method of stably producing a high quality organic EL device by surely avoiding adverse influence due to organic matters and the like when an organic layer is formed on a surface of, for example, a substrate having an anode formed thereon. The means for resolution is characterized in that the inside of an organic EL device production apparatus equipped with an organic film-forming chamber for forming an organic layer on a surface of, for example, a substrate having an anode formed thereon is cleaned with an ozone gas, and the organic layer is then formed.
Public/Granted literature
- US20070254552A1 Production Method of Organic El Device and Cleaning Method of Organic El Device Production Apparatus Public/Granted day:2007-11-01
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