Invention Grant
- Patent Title: Substrate-supporting device
- Patent Title (中): 基板支撑装置
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Application No.: US11252918Application Date: 2005-10-18
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Publication No.: US07691205B2Publication Date: 2010-04-06
- Inventor: Yozo Ikedo
- Applicant: Yozo Ikedo
- Applicant Address: JP Tokyo
- Assignee: ASM Japan K.K.
- Current Assignee: ASM Japan K.K.
- Current Assignee Address: JP Tokyo
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: C23C16/46
- IPC: C23C16/46 ; C23C16/00 ; H01L21/306
Abstract:
A substrate-supporting device for CVD having a substrate-supporting region includes: a substrate-supporting surface which is a continuous surface defining a reference plane on which a substrate is placed; and multiple dimples having bottom surfaces lower than the reference plane. The respective dimples are isolated from each other by a portion of the substrate-supporting surface.
Public/Granted literature
- US20070089670A1 Substrate-supporting device Public/Granted day:2007-04-26
Information query
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