Invention Grant
- Patent Title: Electrolytic etching method and apparatus
- Patent Title (中): 电解蚀刻方法和装置
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Application No.: US10998617Application Date: 2004-11-30
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Publication No.: US07691241B2Publication Date: 2010-04-06
- Inventor: Tsutomu Murakami , Koji Tsuzuki
- Applicant: Tsutomu Murakami , Koji Tsuzuki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2003-401420 20031201; JP2004-321641 20041105
- Main IPC: C25F3/14
- IPC: C25F3/14 ; C25F7/00

Abstract:
The present invention relates to a method and apparatus for partial etching or pattern etching using an electrolysis reaction, wherein, conventionally, there was the problem that an etching line could not be finely formed on a cell edge because of apparatus problems concerning alignment accuracy. The present invention provides a method and apparatus with which fine line etching is possible and which can form a line on a cell edge.Provided is a an electrolytic etching method of a substrate which is formed having a subject etching layer on a surface, having the steps of providing a fixed gap from a substrate end surface which is external to an end surface of the substrate for placing a working part of a working electrode and passing current between the substrate and the working electrode.
Public/Granted literature
- US20050150776A1 Electrolytic etching method and apparatus Public/Granted day:2005-07-14
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