Invention Grant
- Patent Title: Membrane-mediated electropolishing with topographically patterned membranes
- Patent Title (中): 膜介导的电抛光与地形图案膜
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Application No.: US11413367Application Date: 2006-04-28
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Publication No.: US07691250B2Publication Date: 2010-04-06
- Inventor: Stephen Mazur , Charles E. Jackson , Gary W. Foggin
- Applicant: Stephen Mazur , Charles E. Jackson , Gary W. Foggin
- Applicant Address: US DE Wilmington
- Assignee: E.I. Du Pont de Nemours and Company
- Current Assignee: E.I. Du Pont de Nemours and Company
- Current Assignee Address: US DE Wilmington
- Agent Gail D. Tanzer
- Main IPC: B23H3/00
- IPC: B23H3/00 ; C25D17/00 ; C25B9/08

Abstract:
This invention provides membrane-mediated electropolishing (MMEP) processes for polishing and/or planarizing metal work pieces using topographically patterned membranes. The processes can be used for both pure metals and alloys, and provide advantages over conventional electropolishing processes and known MMEP processes using smooth membranes. This invention also provides a cathode half-cell and an apparatus useful in membrane-mediated electropolishing processes. The invention also provides processes for electroengraving and electromachining topographic patterns, holes and/or grooves into the surface of a metal work piece.
Public/Granted literature
- US20060260952A1 Membrane-mediated electropolishing with topographically patterned membranes Public/Granted day:2006-11-23
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