Invention Grant
US07691287B2 Method for immobilizing ligands and organometallic compounds on silica surface, and their application in chemical mechanical planarization 有权
将配体和有机金属化合物固定在二氧化硅表面上的方法及其在化学机械平面化中的应用

Method for immobilizing ligands and organometallic compounds on silica surface, and their application in chemical mechanical planarization
Abstract:
A method of polishing a substrate with a polishing composition comprising an oxidizing agent and abrasive particles having a surface, said surface of the abrasive particles being at least partially modified with 1) at least one stabilizer compound comprising aluminum, boron, tungsten, or both, said stabilizer compound being bound via a covalent bond to said abrasive particles, and 2) an organic chelating compound, said chelating compound being bound via a covalent bond to said stabilizer compound. The organic chelating compounds include one or more of 1) a nitrogen-containing moiety and between one and five other polar groups; 2) a sulfur-containing moiety and between one and five other polar groups; and 3) between two and five polar groups selected from carboxylic acid groups or salts thereof and hydroxyl groups.
Information query
Patent Agency Ranking
0/0