Invention Grant
US07691562B2 Method for forming film pattern, and method for manufacturing device, electro-optical device, electronic apparatus and active matrix substrate
失效
用于形成膜图案的方法以及制造装置,电光装置,电子装置和有源矩阵基板的方法
- Patent Title: Method for forming film pattern, and method for manufacturing device, electro-optical device, electronic apparatus and active matrix substrate
- Patent Title (中): 用于形成膜图案的方法以及制造装置,电光装置,电子装置和有源矩阵基板的方法
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Application No.: US11458531Application Date: 2006-07-19
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Publication No.: US07691562B2Publication Date: 2010-04-06
- Inventor: Toshimitsu Hirai , Katsuyuki Moriya
- Applicant: Toshimitsu Hirai , Katsuyuki Moriya
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2005-210652 20050720; JP2006-080303 20060323
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for forming a film pattern, comprises: disposing a first bank forming material to a substrate so as to form a first bank layer; disposing a second bank forming material on the first bank layer so as to form a second bank layer; and pattering the first bank layer and the second bank layer so as to form a bank including a pattern forming region having a first pattern forming region and a second pattern forming region, the second pattern forming region having a width larger than a width of the first pattern forming region, and being continuously formed from the first pattern forming region, wherein the first bank layer has a sidewall facing the pattern forming region and a first contact angle of less than 50 degrees with respect to a functional liquid containing H2O on the sidewall, and the second bank layer has a second contact angle larger than the first contact angle with respect to the functional liquid.
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