Invention Grant
US07691663B2 CMOS image sensor having double gate insulator therein and method for manufacturing the same 失效
具有双栅极绝缘体的CMOS图像传感器及其制造方法

  • Patent Title: CMOS image sensor having double gate insulator therein and method for manufacturing the same
  • Patent Title (中): 具有双栅极绝缘体的CMOS图像传感器及其制造方法
  • Application No.: US11657908
    Application Date: 2007-01-24
  • Publication No.: US07691663B2
    Publication Date: 2010-04-06
  • Inventor: Ju-Il Lee
  • Applicant: Ju-Il Lee
  • Agency: McAndrews, Held & Malloy, Ltd.
  • Priority: KR2003-27810 20030430
  • Main IPC: H01L21/00
  • IPC: H01L21/00
CMOS image sensor having double gate insulator therein and method for manufacturing the same
Abstract:
A method for manufacturing a CMOS image sensor includes: preparing a semiconductor substrate incorporating therein a p-type epitaxial layer by epitaxially growing up an upper portion of the semiconductor substrate; forming a pixel array in one predetermined location of the semiconductor substrate, the pixel array having a plurality of transistors and a photodiode therein, wherein each transistor employs a gate insulator with a thickness ranging from 40 Å to 90 Å; and forming a logic circuit in the other predetermined location of the semiconductor substrate, the logic circuit having at least one transistor, wherein the transistor employs a gate insulator with a thickness ranging from 5 Å to 40 Å.
Information query
Patent Agency Ranking
0/0