Invention Grant
US07691663B2 CMOS image sensor having double gate insulator therein and method for manufacturing the same
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具有双栅极绝缘体的CMOS图像传感器及其制造方法
- Patent Title: CMOS image sensor having double gate insulator therein and method for manufacturing the same
- Patent Title (中): 具有双栅极绝缘体的CMOS图像传感器及其制造方法
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Application No.: US11657908Application Date: 2007-01-24
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Publication No.: US07691663B2Publication Date: 2010-04-06
- Inventor: Ju-Il Lee
- Applicant: Ju-Il Lee
- Agency: McAndrews, Held & Malloy, Ltd.
- Priority: KR2003-27810 20030430
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for manufacturing a CMOS image sensor includes: preparing a semiconductor substrate incorporating therein a p-type epitaxial layer by epitaxially growing up an upper portion of the semiconductor substrate; forming a pixel array in one predetermined location of the semiconductor substrate, the pixel array having a plurality of transistors and a photodiode therein, wherein each transistor employs a gate insulator with a thickness ranging from 40 Å to 90 Å; and forming a logic circuit in the other predetermined location of the semiconductor substrate, the logic circuit having at least one transistor, wherein the transistor employs a gate insulator with a thickness ranging from 5 Å to 40 Å.
Public/Granted literature
- US20070120159A1 CMOS image sensor having duble gate insulator therein and method for manufacturing the same Public/Granted day:2007-05-31
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