Invention Grant
- Patent Title: Substrate treating method and method of manufacturing semiconductor apparatus
- Patent Title (中): 基板处理方法及制造半导体装置的方法
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Application No.: US11799023Application Date: 2007-04-30
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Publication No.: US07691672B2Publication Date: 2010-04-06
- Inventor: Masaki Hatano , Hiroshi Asami
- Applicant: Masaki Hatano , Hiroshi Asami
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Rockey, Depke & Lyons, LLC
- Agent Robert J. Depke
- Priority: JP2006-144893 20060525
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The present invention provides a substrate treating method including the steps of joining a one-side surface of a substrate to be treated to a support substrate, treating the substrate to be treated in the condition where the substrate to be treated is supported by the support substrate, and removing the support substrate from the substrate to be treated. The step of joining the substrate to be treated to the support substrate includes melting a joint bump formed on the substrate to be treated so as to join the substrate to be treated to the support substrate, and the step of removing the support substrate from the substrate to be treated includes polishing the support substrate so as to remove the support substrate.
Public/Granted literature
- US20070287265A1 Substrate treating method and method of manufacturing semiconductor apparatus Public/Granted day:2007-12-13
Information query
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