Invention Grant
US07691695B2 Semiconductor device having strip-shaped channel and method for manufacturing such a device 有权
具有带状通道的半导体器件及其制造方法

  • Patent Title: Semiconductor device having strip-shaped channel and method for manufacturing such a device
  • Patent Title (中): 具有带状通道的半导体器件及其制造方法
  • Application No.: US11813015
    Application Date: 2005-12-19
  • Publication No.: US07691695B2
    Publication Date: 2010-04-06
  • Inventor: Youri V Ponomarev
  • Applicant: Youri V Ponomarev
  • Applicant Address: NL Eindhoven
  • Assignee: NXP B.V.
  • Current Assignee: NXP B.V.
  • Current Assignee Address: NL Eindhoven
  • Priority: EP04107020 20041228
  • International Application: PCT/IB2005/054306 WO 20051219
  • International Announcement: WO2006/070309 WO 20060706
  • Main IPC: H01L21/336
  • IPC: H01L21/336
Semiconductor device having strip-shaped channel and method for manufacturing such a device
Abstract:
The invention relates to a semiconductor device (10) consisting of a substrate (11) and a semiconductor body (2) comprising a strip-shaped semiconductor region (3,3A,3B) of silicon in which a field effect transistor is formed, wherein a source region (4) of a first conductivity type, a channel region (33) of a second conductivity type opposed to the first, and a drain region (5) of the first conductivity type are arranged in succession, successively, seen in the longitudinal direction of the strip-shaped semiconductor region (3,3A,3B), and wherein the channel region (33) is provided with a gate dielectric (6), on which a first gate electrode (7) is present on a first vertical side of the strip-shaped semiconductor region (3,3A,3B), which gate electrode (7) is provided with a first connection region (7A), and on which a second gate electrode (8) is present on a second vertical side of the strip-shaped semiconductor region (3,3A,3B) positioned opposite the first vertical side, which second gate electrode (8) is provided with a second connection region (8A). According to the invention the first and second gate electrodes (7,8) completely fill the space on either side of the strip-shaped semiconductor region (3,3A,3B) over the width of the connection regions (7A,8A). In a preferred embodiment the gate electrodes (7,8) each border a horizontal side of the strip-shaped semiconductor region (3,3A,3B). The device (10) according to the invention is very compact, suitable for the sub 45 nm domain and easy to manufacture.
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