Invention Grant
- Patent Title: Vertical nanotube semiconductor device structures and methods of forming the same
- Patent Title (中): 垂直纳米管半导体器件结构及其形成方法
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Application No.: US11926661Application Date: 2007-10-29
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Publication No.: US07691720B2Publication Date: 2010-04-06
- Inventor: Toshiharu Furukawa , Mark Charles Hakey , Steven John Holmes , David Vaclav Horak , Charles William Koburger, III , Peter H. Mitchell , Larry Alan Nesbit
- Applicant: Toshiharu Furukawa , Mark Charles Hakey , Steven John Holmes , David Vaclav Horak , Charles William Koburger, III , Peter H. Mitchell , Larry Alan Nesbit
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans, LLP
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
Vertical device structures incorporating at least one nanotube and methods for fabricating such device structures by chemical vapor deposition. Each nanotube is grown by chemical vapor deposition catalyzed by a catalyst pad and encased in a coating of a dielectric material. Vertical field effect transistors may be fashioned by forming a gate electrode about the encased nanotubes such that the encased nanotubes extend vertically through the thickness of the gate electrode. Capacitors may be fashioned in which the encased nanotubes and the corresponding catalyst pad bearing the encased nanotubes forms one capacitor plate.
Public/Granted literature
- US20080227264A1 VERTICAL NANOTUBE SEMICONDUCTOR DEVICE STRUCTURES AND METHODS OF FORMING THE SAME Public/Granted day:2008-09-18
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