Invention Grant
US07691727B2 Method for manufacturing an integrated circuit with fully depleted and partially depleted transistors
有权
用于制造具有完全耗尽和部分耗尽的晶体管的集成电路的方法
- Patent Title: Method for manufacturing an integrated circuit with fully depleted and partially depleted transistors
- Patent Title (中): 用于制造具有完全耗尽和部分耗尽的晶体管的集成电路的方法
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Application No.: US11846622Application Date: 2007-08-29
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Publication No.: US07691727B2Publication Date: 2010-04-06
- Inventor: Philippe Coronel , Michel Marty
- Applicant: Philippe Coronel , Michel Marty
- Applicant Address: FR Montrouge FR Crolles
- Assignee: STMicroelectronics S.A.,STMicroelectronics Crolles 2 SAS
- Current Assignee: STMicroelectronics S.A.,STMicroelectronics Crolles 2 SAS
- Current Assignee Address: FR Montrouge FR Crolles
- Agency: Wolf, Greenfield & Sacks, P.C.
- Agent Lisa K. Jorgenson; James H. Morris
- Priority: FR0653524 20060831
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for manufacturing an integrated circuit containing fully and partially depleted MOS transistors, including the steps of forming similar MOS transistors on a thin silicon layer formed on a silicon-germanium layer resting on a silicon substrate; attaching the upper surface of the structure to a support wafer; eliminating the substrate; depositing a mask and opening this mask at the locations of the fully-depleted transistors; oxidizing the silicon-germanium at the locations of the fully-depleted transistors in conditions such that a condensation phenomenon occurs; and eliminating the oxidized portion and the silicon-germanium portion, whereby there remain transistors with a thinned silicon layer.
Public/Granted literature
- US20080064174A1 METHOD FOR MANUFACTURING AN INTEGRATED CIRCUIT WITH FULLY DEPLETED AND PARTIALLY DEPLETED TRANSISTORS Public/Granted day:2008-03-13
Information query
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