Invention Grant
US07691727B2 Method for manufacturing an integrated circuit with fully depleted and partially depleted transistors 有权
用于制造具有完全耗尽和部分耗尽的晶体管的集成电路的方法

Method for manufacturing an integrated circuit with fully depleted and partially depleted transistors
Abstract:
A method for manufacturing an integrated circuit containing fully and partially depleted MOS transistors, including the steps of forming similar MOS transistors on a thin silicon layer formed on a silicon-germanium layer resting on a silicon substrate; attaching the upper surface of the structure to a support wafer; eliminating the substrate; depositing a mask and opening this mask at the locations of the fully-depleted transistors; oxidizing the silicon-germanium at the locations of the fully-depleted transistors in conditions such that a condensation phenomenon occurs; and eliminating the oxidized portion and the silicon-germanium portion, whereby there remain transistors with a thinned silicon layer.
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