Invention Grant
- Patent Title: Metal line in semiconductor device and fabricating method thereof
- Patent Title (中): 半导体器件中的金属线及其制造方法
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Application No.: US12254019Application Date: 2008-10-20
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Publication No.: US07691738B2Publication Date: 2010-04-06
- Inventor: Hee-Bae Lee
- Applicant: Hee-Bae Lee
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2007-0107737 20071025
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A metal line in a semiconductor device and fabricating method thereof includes a first contact plug on a substrate, a first insulating interlayer over the substrate including the first contact plug, a first etch stop layer formed over the first insulating interlayer; a trench in the first insulating interlayer and the first etch stopper layer, a metal line in the trench, the metal line including a second contact plug projecting from the trench, wherein the metal line and the trench are formed as a single body, and a second insulating interlayer over the substrate including the metal line and the second contact plug.
Public/Granted literature
- US20090108454A1 METAL LINE IN SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF Public/Granted day:2009-04-30
Information query
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