Invention Grant
- Patent Title: Transport robot and transport apparatus
- Patent Title (中): 运输机器人和运输设备
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Application No.: US11653423Application Date: 2007-01-16
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Publication No.: US07692120B2Publication Date: 2010-04-06
- Inventor: Toshio Koike
- Applicant: Toshio Koike
- Applicant Address: JP Chigasaki
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Chigasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2004-357778 20041210
- Main IPC: H01L21/68
- IPC: H01L21/68 ; B25J18/00 ; B25J19/00
Abstract:
A transport robot including a release-side high radiation ratio portion and a receive-side high radiation ratio portion that face each other. Heat in a substrate conducted to a base portion due to thermal conduction is released as radiant heat from the release-side high radiation ratio portion, and the radiant heat is absorbed by the receive-side high radiation ratio portion. The receive-side high radiation ratio portion is formed on a heat-receiving plate that is thermally connected to a vacuum chamber so that radiant heat absorbed by the receive-side high radiation ratio portion is transferred to the vacuum chamber. As a result, even in the case where the high-temperature substrate is transported in a vacuum atmosphere, heat from the substrate is not accumulated in a transport system, and the transport system hardly reaches a high temperature.
Public/Granted literature
- US20070166135A1 Transport robot and transport apparatus Public/Granted day:2007-07-19
Information query
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