Invention Grant
- Patent Title: MEMS type thermally actuated out-of-plane lever
- Patent Title (中): MEMS型热致动外平面杆
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Application No.: US11729086Application Date: 2007-03-26
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Publication No.: US07692127B1Publication Date: 2010-04-06
- Inventor: Eric H. Linn , Michael A. Deeds , David Herman
- Applicant: Eric H. Linn , Michael A. Deeds , David Herman
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agent Fredric J. Zimmerman
- Main IPC: F42B15/01
- IPC: F42B15/01 ; F42B10/00 ; B81B7/00 ; F42B15/00

Abstract:
A MEMS apparatus includes a substrate; electrical contacts disposed on the substrate; a thermal arch beam supported by and connected between the contacts, the thermal arch beam including a midpoint and a protrusion located at about the midpoint; a lever having an axis of rotation and a bearing surface upon which the protrusion is operable to bear, a pair of lever supports disposed on the substrate for rotatably supporting the lever about the axis of rotation, an area of contact between the protrusion and the bearing surface being positioned vertically between the axis of rotation and the plane of the substrate. A voltage difference between the electrical contacts causes the thermal arch beam to move horizontally in the plane and the protrusion to bear against the lever causing rotation of the lever out of the plane.
Information query
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