Invention Grant
- Patent Title: Dose uniformity correction technique
- Patent Title (中): 剂量均匀性校正技术
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Application No.: US11739314Application Date: 2007-04-24
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Publication No.: US07692164B2Publication Date: 2010-04-06
- Inventor: Alfred M. Halling
- Applicant: Alfred M. Halling
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/20

Abstract:
Non uniform ion implantations in a pendulum type of ion implantation are mitigated by adjusting movement of a wafer according to a corresponding non uniform function. More particularly, a non uniform ion implantation function is obtained by measuring and/or modeling ion implantations. Then, movement of a wafer along a second non arcuate scan path is adjusted according to the non uniform ion implantation function to facilitate uniform ion implantations.
Public/Granted literature
- US20080067438A1 DOSE UNIFORMITY CORRECTION TECHNIQUE Public/Granted day:2008-03-20
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