Invention Grant
- Patent Title: Method and apparatus for determining a relative position of a processing head with respect to a substrate with a structure
- Patent Title (中): 用于确定处理头相对于具有结构的基底的相对位置的方法和装置
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Application No.: US11990088Application Date: 2006-09-29
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Publication No.: US07692174B2Publication Date: 2010-04-06
- Inventor: Cornelis Petrus Du Pau , Peter Brier , Franciscus Cornelius Dings
- Applicant: Cornelis Petrus Du Pau , Peter Brier , Franciscus Cornelius Dings
- Applicant Address: NL Eindhoven
- Assignee: OTB Groups B.V.
- Current Assignee: OTB Groups B.V.
- Current Assignee Address: NL Eindhoven
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: NL1030063 20050929
- International Application: PCT/NL2006/000487 WO 20060929
- International Announcement: WO2007/037683 WO 20070405
- Main IPC: G01N21/86
- IPC: G01N21/86 ; G01V8/00

Abstract:
A method and apparatus wherein a substrate is provided with a preformatted structure, with structural elements arranged in a matrix, wherein the matrix extends in an X-direction and Y-direction, wherein a processing head is provided, wherein a camera is provided which is connected with the processing head and which comprises at least one series of sensors arranged along a main line, wherein the camera scans the substrate and thereby provides at least one one-dimensional camera signal, wherein, for real-time determining at least the X-position and the Y-position of the structure with respect to the camera, the said main line includes an angle with the X-direction and with the Y-direction, wherein the angle is chosen such that the camera signal contains spatially separated X-position information and Y-position information and that the X-position information and the Y-position information can be separated from the sensor signal with the aid of signal processing.
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